Experimental Investigation and Modeling of Surface Deformation in Backside Patterning of Surface Texture

Ultraprecision textured surfaces with functional requirements are extensively used in engineering, optics, biomedical and microelectronic products. This work investigates backside patterning of micro-scale textures with nanometer surface finish on flat surfaces. In this technique a pre-fabricated macro-scale backside pattern was machined as a first step, and thereafter the front side of the workpiece is face turned with single point diamond tool to generate textured surfaces. The geometry and type of textures fabricated are dependent on the pre-fabricated pattern and machining conditions. Experimental results with a prediction method for the surface deformation are investigated. Firstly, source residual stresses are approximated for a measured surface deformation for a type of texture geometry. The known source residual stresses are then taken as input to predict the deformation for other textures geometries. The simulation results showed a good agreement with the experimental results.